Introduction: The "Secret Manual" of Vibration Isolation Platforms

In the field of precision instruments, vibration isolation technology is a core means to ensure stable equipment operation and enhance measurement accuracy. This article delves into the "internal skills" of high-end optical platforms, exploring the evolution from passive to active vibration isolation techniques.

Chapter 1: Passive Vibration Isolation – The External Martial Arts Approach

Working Principle

Passive vibration isolation absorbs vibration energy through the deformation of elastic elements such as rubber or springs. When external vibrations are transmitted, the elastic elements deform, converting vibration energy into heat or other forms of energy for dissipation, thereby reducing vibrations transmitted to the equipment.

Typical Product: Solid Rubber Vibration Isolator POT-P Series

Technical Highlights:

Composite Rubber Structure: Optimizes stiffness matching in vertical and horizontal directions through a multi-layer rubber composite design, achieving efficient isolation of mid-to-high-frequency vibrations (>10Hz).

Enhanced Horizontal Vibration Isolation: Low horizontal inherent frequency of 3-8Hz and a damping ratio of 0.05-0.2 effectively suppress horizontal swaying of equipment.

Convenient Leveling System: Equipped with lifting adjustment seats for manual precision leveling (planarity ≤0.1mm), with optional casters for quick mobility.

Performance Parameters:

Vertical inherent frequency: 6.5-12Hz

Load Range: 180-800kg per unit

Recovery Time: <5s

Operating Temperature: -20°C to +60°C

Application Scenarios:

Suitable for scenarios with lower vibration requirements such as microscopes and medical biological equipment, including ordinary optical microscopes, centrifuges, and small lasers.

Chapter 2: Air-Float Vibration Isolation – The Soft Martial Arts Approach

Working Principle

Air-float vibration isolation achieves ultra-low-frequency vibration isolation through air springs and an automatic leveling system. The air springs utilize the elasticity of compressed air to support the load, while the automatic leveling system adjusts the air pressure in real-time via sensors to maintain a level platform, isolating low-frequency vibrations.

Typical Product: Air-Float Pendulum-Type Vibration Isolation Optical Platform ZDT-B Series

Technical Highlights:

Single Pendulum Decoupling Design: Converts horizontal vibrations into pendulum motion using a pendulum rod structure, achieving a low horizontal inherent frequency of 1.0-1.5Hz (vertical 1.0-2.0Hz) and an isolation efficiency of 86-99% (5-10Hz).

Pneumatic Automatic Leveling: Supports ±10mm height adjustment with a leveling precision of ±0.1mm, adapting to minor ground inclinations.

Silent Air Supply System: Equipped with a low-noise air compressor (<50dB) to meet laboratory silence requirements.

High-Precision Tabletop: Tabletop planarity of 0.05-0.1mm/㎡ with a matte surface finish to reduce optical reflection interference.

Performance Parameters:

inherent frequency: Horizontal 1.0-1.5Hz, Vertical 1.0-2.0Hz

Isolation Bandwidth: 1-100Hz

Load Capacity: 0.5-3 tons (customizable)

Air Supply Pressure: 0.5-0.8MPa

Application Scenarios:

Suitable for precision scenarios with extremely high vibration requirements such as microscopes and laser interferometers, including semiconductor inspection, quantum optics experiments, and nanomaterial processing.

Chapter 3: Active Vibration Isolation – The Supreme Internal Martial Arts Approach

Working Principle

Active vibration isolation achieves vibration cancellation through a sensor-controller-actuator closed-loop system:

Sensors: Detect platform vibrations (acceleration, displacement, etc.) in real-time.

Controller: Calculates compensation signals (e.g., using PID control algorithms).

Actuators: Generate reverse vibrations using electromagnetic forces or piezoelectric ceramics to cancel out the original vibrations.

Typical Product: LHV Series Active Vibration Isolation Module

Technical Highlights:

Hybrid Vibration Isolation Technology: Combines air springs (for low-frequency isolation) with single pendulum decoupling (for horizontal decoupling) to achieve a low-frequency vibration transmission rate of ≤-30dB from 0.5-20Hz.

Six-Degree-of-Freedom Control: Supports compensation for translational movements in the X/Y/Z directions and rotational movements, with a displacement compensation precision of ±2μm.

Ultra-Fast Response Capability: Response time of 8ms and shock resistance of 25g, capable of suppressing sudden vibrations (e.g., equipment start-stop, personnel movement).

Intelligent Load Adaptation: Automatically identifies load changes (0.5-5 tons) and dynamically adjusts control parameters to maintain stable vibration isolation performance.

Performance Parameters:

Isolation Bandwidth: 0.5-200Hz

Transmission Rate @10Hz: -35dB

Leveling Precision: ±0.05mm

Noise Level: <45dB (at 1m distance)

Application Scenarios:

Suitable for high-precision scenarios such as acoustic laboratories, medical imaging equipment, and quantum research, including atomic force microscopes (AFM), photolithography machines, and nuclear magnetic resonance imaging (MRI) systems.

Comparative Analysis of the Three Technologies

Practical Selection Guide: Three Steps to Define Requirements

Step 1: Clarify Experimental Precision Requirements

Micron-level (e.g., ordinary microscopes): Passive vibration isolation (POT-P Series)

Sub-micron-level (e.g., laser interferometers): Air-float vibration isolation (ZDT-B Series)

Nanometer-level (e.g., AFM, photolithography machines): Active vibration isolation (LHV Series)

Step 2: Evaluate Environmental Vibration Conditions

Predominantly low-frequency vibrations (1-10Hz): Air-float or active vibration isolation

Predominantly high-frequency vibrations (>10Hz): Passive or air-float vibration isolation

Complex vibrations (multi-frequency band mixing + sudden impacts): Active vibration isolation

Step 3: Consider Long-Term Costs

Short-term low cost: Passive vibration isolation

Medium- to long-term cost-effectiveness: Air-float vibration isolation (low maintenance costs)

Pursuit of ultimate performance: Active vibration isolation (full lifecycle costs require comprehensive evaluation)

Conclusion

The choice of vibration isolation technology should be based on a comprehensive decision-making process that considers precision requirements, vibration environment, and cost budget. From the "economical and practical" passive vibration isolation to the "precise and stable" air-float vibration isolation, and finally to the "intelligent and adaptive" active vibration isolation, each technical route has its own application value and essence.