Product Description
The LVH-T15 heavy-duty active vibration isolation platform is a heavy-duty active vibration isolation platform specially developed for Transmission Electron Microscopes (TEM) and Scanning Electron Microscopes (SEM). It adopts the composite technology of electromagnetic actuators and four-stage air springs to achieve vibration suppression across the entire frequency range of 1 – 200 Hz. Through the six-degree-of-freedom active compensation technology, it can eliminate the interference of building swaying in the range of 0.5 – 5 Hz on the imaging system.
Core Advantages
Eliminate low-frequency micro-vibrations at the level of 1 μm (in line with the ISO 14644-1 Class 4 standard).
With an ultra-large load-bearing capacity of 500 kg (stiffness deviation < 0.8%).
Support online modal analysis (equipped with a built-in FFT spectrum diagnosis module).
Precision Metrology: Atomic Force Microscope (AFM) (with the scanning speed increased to 20 Hz).
Semiconductor Inspection: Focused Ion Beam (FIB) system (with the beam stability improved by 45%).
Life Sciences: Cryo-Electron Microscopy (CryoEM) (with the three-dimensional reconstruction resolution increased by 30%).
Materials Science: Aberration-Corrected Transmission Electron Microscope (with the point resolution improved to 0.07 nm).
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Technical Parameters
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Specifications
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Overall Dimensions (L×W×H, mm)
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1140 × 910 × 220 mm (L × W × H)
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Effective Table Area (mm)
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1000 × 800 mm (precision lapped plane)
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Net Weight (kg)
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350 kg (including control system)
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Vibration Isolation Bandwidth
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200 Hz (6 degrees of freedom)
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Low-Frequency Attenuation Performance
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> 35 dB @ 5 Hz (corresponding to 90% vibration isolation efficiency)
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Loaded Table Stability
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< ± 2 μm/m·Hz (0–150 Hz)
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Dynamic Response Characteristic
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30 ms step response suppression (0–100% load)
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Pneumatic System
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0.6 MPa compressed air (air consumption: 0.5 m³/h)
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Communication Interface
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RS232 + EtherCAT dual protocol
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Installation Datum
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≤ 0.05 mm/m² flatness (granite datum)
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Environmental Requirements
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Air supply pressure: 0.5–0.8 MPa (clean, dry air)
Grounding resistance: < 2 Ω (independent grounding point) Electromagnetic compatibility: 10 V/m @ 10 kHz–1 GHz (compliant with EN 55011) |
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Selection Configuration
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Basic version: Single vibration isolation unit (suitable for single electron microscope systems)
Extended version: Dual-link system (supports multi-probe head linkage) Custom version: Ultra-low vibration (< 0.1 μm/s vibration velocity) |
